Method of manufacturing semiconductor device

  • Inventors:
  • Assignees: Ibm
  • Publication Date: October 21, 1980
  • Publication Number: JP-S55134981-A

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Cited By (3)

    Publication numberPublication dateAssigneeTitle
    JP-H0481345-B2December 22, 1992Matsushita Electronics Corp
    JP-S5893351-AJune 03, 1983Toshiba CorpSemiconductor device and its manufacture
    JP-S598374-AJanuary 17, 1984Matsushita Electronics CorpInsulated gate field-effect transistor